Flexible Electronics News

Applied Materials Clears Critical Roadblock to EUV Lithography with New Photomask Etch System

New photomask etch technology meets unique manufacturing challenges at 16nm and beyond

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By: DAVID SAVASTANO

Editor, Ink World Magazine

Applied Materials, Inc. advanced the state-of-the art in photomask technology with its new Applied Centura Tetra EUV Advanced Reticle Etch system. Overcoming a major hurdle to the adoption of EUV1 lithography, the new Tetra EUV system solves the critical and unmet challenge of etching the new EUVL photomasks with nanometer-level accuracy and world-class defect performance to enable the fabrication of multiple new generations of high-performance semiconductor chips. “Our new Tetra EUV sy...

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